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T series - Triple target thermal evaporator 

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Key Features


  • Multi-layer thermal coatings

  • Large format chamber

  • TMP and rotary pumps equipped

  • Full range vacuum gauge

  • Evaporation source (boat / basket / coil) selection for multilayer thin film deposition

  • co-evaporation to form alloy films

  • Quartz crystal monitoring system for real time thickness measurement (1 nm precision)

  • Manual or automatic Timed and Thickness deposition

  • Intuitive touch screen to control the coating process and rapid data input

  • User friendly software that can be updated via network

  • Equipped with electronic shutter

  • Equipped with rotary sample holder

  • 500 °C irradiative substrate heater

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