W series - Unique Sputtering eqiupped Thermal Evaporation

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Key Features

 

  • Two cathode magnetron with 3 degree of freedom adjustment.

  • DC power supply with automatic matching box.

  • Thermal evaporation platform with 300 A current.

  • Boat holder and current display.

  • Double layers water cooled vacuum chamber.

  • Turbo molecular pump for high vacuum.

  • Backup rotary pump.

  • Smart valve for turbo pump with touch screen monitor.

  • Electro pneumatic valves.

  • Crystal thickness monitor with 1nm resolution and 4 sensor holder.

  • Substrate holder with electronic shutter and electronic feedthrough four Magnetron .

  • Two stage backup rotary pump.

  • Smart valve for turbo pump.Touch screen interface.

  • Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder.

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