L series - Turbo molecular pump equiped large chamber sputter coater
Suitable for large specimens up to 150mm diameter
Key Features
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DC and RF power suply for conductive and non-conductive materials
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High precision quartz crystal thickness monitor
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Intuitive touch screen to control the coating process and rapid data input
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User friendly software that can be updated via network
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Control coating rate to achieve finer grain structures
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Manual or automatic Timed and Thickness sputtering.
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Easy-to-change specimen stages (rotation stage as standard)
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Reproducible coatings
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TurboMolecular pump optional
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Carbon Coating in two modes: Flash mode and Puls mode
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Recording and plating all coating and sputtering parameters live
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Options
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Carbon fiber evaporation head
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High current power supply
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Bias voltage stage
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Heating stage
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Quartz crystal
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Planetary sample rotation
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Sputtering targets
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Fiber carbon
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